Williams, the Cavaliers' point guard, has a strained left groin. Varejao, Cleveland's center, has bruised ribs.
Both players were injured during Wednesday night's 95-87 loss to New Jersey and were inactive Saturday.
Williams missed most of training camp and didn't play in the first three games of the regular season because of a strained right groin. He's averaging 14.6 points and is shooting 36 percent from the field in five games.
Varejao was injured in the first quarter against the Nets, but returned and played most of the second half. He's averaging 9.6 points and 9.4 rebounds per game.
Information from The Associated Press was used in this report.